Excimer Laser #1, #2
Company
COHERENT Co., Ltd.
Model
#1 : COMPex-Pro
#2 : COMPex 205 F
Specification
248 nm wavelength (excited by KrF gas)
Pulse energy : up to 750 mJ
Maximum repetition rate : 50 Hz
Average power : 33 W
Contact
Jaehyun Lee (이재현) lee.jaehyun@kaist.ac.kr
Pulsed Laser Deposition Chamber #A, #Y, #L, #K, #S
Total 5 vacuum chambers
Company
Collaborated with DADA KOREA Co., Ltd.
Specification
Base pressure : 5.0 × 10-6 Torr
Substrate temperature up to 800 °C (#A, #Y, #K, #S), 900 °C (#L)
Multiple target holder (4 channel)
Automatic laser ablation & target manipulation system (#Y, #K)
High pressure RHEED system up to 100 mTorr (#Y, #L, #K)
Background gas : O2, Ar (#L)
Annealing gas : H2 (#L), N2 , O2, Ar (#L)
Contact
Minho Kang (강민호) 101hnmo@kaist.ac.kr
High Resolution Thin-film X-Ray Diffractometer
Company
PANalytical Co., Ltd.
Model
X’Pert-PRO MRD
Specification
High tension generator : Max. power : 3 kW or more
X-ray tube with a target of Cu
Specimen holder : 4 inch& 6 inch wafer holder
High resolution/precision goniometer : reproducibility 0.0001° or better
Incident beam optics for high resolution :
2 bounce Hybrid monochromator (Multi-layer mirror + channel cut monochrometer : Ge(022))
4 bounce Crystal Ge(220) / Parabolic multi layer mirror
Diffracted beam attachment for high resolution :
Triple axis (analyzing crystal) attachment with channel cut crystal of Ge(220) 3 bounce
Detector : Proportional detector (Xe) / PIXCEL-3D
Sample Stage for High Temperature : Operating temp. range : room to 1100 ℃ or wider
Contact
Minho Kang (강민호) 101hnmo@kaist.ac.kr
KARA (link)
Atomic Force Microscopy #1
Company
Bruker
Specification
TBA
Contact
Yong-Jun Kwon (권용준) kwonyj57@kaist.ac.kr
Atomic Force Microscopy #2
Company
Asylum Research
Specification
X & Y range : 120 μm × 120 μm
X & Y sensors < 130 pm noise
Z range > 15 μm ( > 40 μm option)
Z sensor < 35 pm noise
Light source : low-coherence infrared superluminescent diode
DC detector noise < 10 pm
Detector bandwidth : 7 MHz
DC height noise < 20 pm
AC height noise < 20 pm
Sample size ≤ 80 mm diameter
Sample thickness ≤ 10 mm ( ≤ 27 mm option)
Contact
Yong-Jun Kwon (권용준) kwonyj57@kaist.ac.kr
Physical Properties Measurement System (PPMS)
Company
Quantum Design
Model
PPMS Model 6000
Specification
Temperature range : 1.9 to 400 K (6 K/min. cooling, 10 K/min. warming)
Magnetic field range : ± 9 T, max 190 Oe/s (> 1 T/min)
Sample chamber : 2.6 cm diameter to accommodate custom probes
Electrical transport :
AC Resistance : 10 μΩ - 10 MΩ in a 4-probe configuration/2 MΩ - 5 GΩ in a 2-probe configuration
DC Resistance : 10 μΩ - 5 MΩ in a 4-probe configuration with source currents between 2 nA – 8 mA
Horizontal Rotator : sample rotation range of - 10˚ ~ 370˚
Magnetometry :
Vibrating Sample Magnetometer (VSM); noise levels of less than 6 x 10-7 emu at 300 K
Wide Range Resistance Measurement set
Ke6221 : current source 1 ea.
Ke2182a : nano voltameter 1 ea.
Ke6517a : electrometer / high resistance meter 1 ea.
Agilent 33210a : function generator 1 ea.
SR830 : lock-in amplifier 1 ea.
UHF LI 600 MHz : high frequency lock-in amplifier 1 ea.
Contact
Jaehyun Lee (이재현) lee.jaehyun@kaist.ac.kr
Low Temperature Probe System
Company
Lake Shore Cryotronics
Model
CPX-HF
Specification
Temperature range : 4.4 ~ 400 K
Vacuum : Optional high vacuum < 5 x 10-7 Torr
Microwave probes : Frequency range DC up to 67 GHz for RF measurements
Probe arms with 3-axis adjustments and ± 5 theta planarization
Sample rotation : ± 5˚ in-plane rotation
Radiation shielding : viewport surrounds sample; outer second (partial) radiation shield
Cooling source : Liquid helium (LHe)
Contact
Jaehyun Lee (이재현) lee.jaehyun@kaist.ac.kr
Probe station & Optical microscopy & Precision LC (Ferroelectric tester)
Company
MSTECH (Probe station)
RADIANT TECHNOLOGIES, INC. (Precision LC)
Specification
Voltage Range : ±100 V
Max. Hysteresis Frequency : 1 kHz
Min. Pulse Width : 50 μs
Min Rise Time : 40 μs (@ 5 V)
Min. Resolution Electrometer : 305 μV
Contact
Yong-Jun Kwon (권용준) kwonyj57@kaist.ac.kr
Semiconductor Analyzer
Company
Tektronix
Specifiaction
Temperature
Precision: ± 3 °C
Operations: 10 ~ 40 °C
Storage: -15 ~ 60 °C
Humidity
For precision: 5 ~ 60 % (non-condensing)
Operations: 5 ~ 80 % (non-condensing)
Storage: 5 ~ 90 % (non-condensing)
Altitude
Operations: 0 ~ 2000 m (non-condensing)
Storage: 0 ~ 4600 m (non-condensing)
Voltage & Current range
High voltage: -200 ~ 200 V, -10 ~ 10 mA
High current: -20 ~ 20 V, -100 ~ 100 mA
Contact
Juhyun Lee (이주현) solar314@kaist.ac.kr
Solartron Impedance Analyzer
Company
AMETEK Science Instruments, Solartron Analytical
Model
Solartron 1260 Impedance Analyzer
Solartron 1296 Dielectric interface
Specification
Solartron 1260:
Frequency range : 10 μHz to 32 MHz
Signal amplitudes: up to 3 V rms
DC bias : up to 40.95 V
Current mearuement: 6 μA to 60 mA
Impedance ranges: 1 pF to 10 mF, 10 mΩ to 100 MΩ, 100 nH to 1000 H
Solartron 1260 + 1296:
Frequency range: 10 μHz to 10 MHz
Signal amplitudes: up to 7 V rms
DC bias: up to 40 V
Current measurement: 1 fA to 100 mA
Impedance ranges: 1 pF to > 0.1F, 100 Ω to > 100 TΩ
Contact
Jeonghoon Suh(서정훈) chemist1104@kaist.ac.kr
Clean Room
Etching & Sputter (Ti & Pt) chamber
Spin coater 1200D (MIDAS system)
Hot plate PC-400D (Corning)
UV mask aligner MDA-400s (MIDAS system)
Quartz tube furnace
Specification
Base pressure: 8 × 10-5 Torr (Etching & Sputter chamber), 10 mTorr (Tube furnace)
Background gas: N2, Ar
1 ~ 5 nm/min etching by Ar ion. (Etching)
Ti/Pt deposition rate up to 10 nm/min (Sputter)
300 ~ 7000 rpm with error ± 3 % (Spin coater)
Thickness 1 μm (Spin coater)
Temperature up to 550 °C (Hot plate)
Pattern precision ± 1 μm (Mask aligner)
Up to 1050 °C (Tube furnace)
Contact
Jihun Kim (김지훈) jihun112@kaist.ac.kr
Confocal Raman Spectroscopy
Company
WITec
Model
WITec alpha300R
Specification
532 nm laser (maximum 75 mW at laser output)
633 nm laser (maximum 35 mW at laser output)
Ultra-High-Throughput-Spectrometer (UHTS600)
Low Frequency Raman Filter allowing stokes- and anti-stokes Raman measurements starting at ± 10 cm-1
Motorized z-stage (single step 10 nm resolution)
Motorized x-y sample scanning stage (step 100 nm)
Objective lens :
10x(N.A. 0.25/WD 11mm), 50x(N.A. 0.35/WD 18mm), 100x(N.A. 0.9/WD 0.31mm), 100x(N.A. 0.8/WD 3.4mm)
Polarization option
Fast photocurrent measurement kit
LN2 portable cryostat (> 90 K)
Contact
Minho Kang (강민호) 101hnmo@kaist.ac.kr
Fume Hood
Sonicator
Contact
Yong-Jun Kwon (권용준) kwonyj57@kaist.ac.kr
Box Furnace
Specification
Max Temperature : 1500 ℃
Contact
Yong-Jun Kwon (권용준) kwonyj57@kaist.ac.kr
